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IntroductionDocumentOther ResourcesRelated Publications IntroductionLPCVD is class library for simulation of the dynamics of thin film surface profile in Chemical Vapor Deposition (CVD) process. Key elements include: Classes enable dynamic system simulation and controller design Utilities for data analysis Stochastic PDE model for surface dynamics PDE model for gas phase transfer phenomena Kinetic Monte Carlo Model of surface dynamics Model predictive controller The rest of this section gives mo